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近年来,加工亚微米级和纳米级精度零件的机器制造部门正在蓬勃发展。对被加工零件有下列要求:尺寸精度(表面相对位置精度)在1m长度上为1～2μm;成形精度在200mm×200mm面积上为1nm;表面粗糙度Ra=1nm。
In recent years, machine-building departments that process sub-micron and nano-scale precision parts are booming. The parts to be processed have the following requirements: Dimensional accuracy (surface relative position accuracy) in the 1m length of 1 ~ 2μm; forming accuracy of 200mm × 200mm area of 1nm; surface roughness Ra = 1nm.