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新型聚合物石英压电传感器制备过程中,AT切型石英压电传感器基体的表面粗糙度及其基膜界面化学性质影响聚合物薄膜的生长,导致聚合物薄膜厚度不均匀、表面存在缺陷,使得传感器采集的频率信号不稳定.本文建立了新型聚合物石英压电传感器在考虑薄膜厚度不均、中心缺陷条件下的力学模型,利用ANSYS有限元软件对其进行模态分析,得到复杂条件下传感器振动特性.模态分析结果发现,传感器固有频率值随聚合物薄膜缺陷的半径值增大呈现出从稳定到发散的趋势、随薄膜的厚度值增大呈现出线性增大的趋势.研究结果表明,新型聚合物石英压电传感器的生产应确保薄膜厚度均匀且严格控制中心缺陷半径小于0.5 mm,该结果为制备稳定的新型聚合物石英压电传感器提供了重要依据.
During the preparation of new polymer quartz piezoelectric sensor, the surface roughness of AT cut type quartz piezoelectric sensor substrate and the chemical nature of its base film interface affect the growth of the polymer film, resulting in uneven thickness of the polymer film and defects on the surface, The frequency signal collected by the sensor is unstable.This paper established a mechanical model of the new polymer quartz piezoelectric sensor under the condition of uneven film thickness and center defect and carried out modal analysis using ANSYS finite element software to obtain the sensor under complex conditions The results of modal analysis show that the natural frequency value of sensor shows a trend from stable to divergent with the increase of the radius value of polymer film defects and shows a linear increase with the increase of film thickness.The results show that . The production of new polymer quartz piezoelectric sensors should ensure that the film thickness is uniform and the critical defect radius of the control center is less than 0.5 mm. This result provides an important basis for preparing a stable new polymer quartz piezoelectric sensor.