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用有限元方法计算了硅基光波导器件的应力 ,得到由应力引起的双折射 ,从理论上分析了内应力对器件偏振特性的影响。得出结论 :硅基与其它层材料热膨胀系数的不同 ,是引起芯区双折射的主要因素 ,通过掺杂、调整覆层的热膨胀系数 ,可以得到双折射系数较小的光波导。
The stress of silicon-based optical waveguide device was calculated by finite element method, and the birefringence caused by stress was obtained. The influence of internal stress on the polarization characteristics of the device was theoretically analyzed. It is concluded that the difference between the thermal expansion coefficients of silicon and other layers is the main factor that causes the birefringence of the core region. By doping and adjusting the thermal expansion coefficient of the cladding layer, the optical waveguide with smaller birefringence coefficient can be obtained.