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像质校正灵敏矩阵是像质校正算法中由像质参数计算像质校正参数的过渡矩阵。矩阵中的元素表征了像质参数随像质校正参数变化的灵敏程度。像质校正灵敏矩阵是投影光刻机像质校正算法中重要的参数集合。提出了一种投影光刻机像质校正灵敏矩阵的原位测量方法,该方法利用人工神经网络(ANN)对像质参数和像质校正参数之间的依赖关系进行建模,通过网络自学习能力优化网络的连接权值使其逐渐逼近像质校正灵敏矩阵的数值,从而实现像质校正灵敏矩阵的测量。实验结果表明该方法可以高精度、有效地获得投影光刻机像质校正灵敏矩阵。
The image correction sensitivity matrix is a transition matrix that calculates the image quality correction parameters from the image quality parameters in the image quality correction algorithm. The elements in the matrix characterize the sensitivity of the image quality parameters to changes in the image quality correction parameters. Image Correction Sensitivity Matrix is an important parameter set in image quality correction algorithm of projection lithography machine. An in-situ measurement method for image quality correction sensitivity matrix of projection lithography machine was proposed. This method used artificial neural network (ANN) to model the dependence between image quality parameters and image quality correction parameters and self-learning through network The ability to optimize the connection weights of the network gradually approximates the values of the matrix as the matrix of the sensitivity correction, so as to realize the measurement of the matrix of correction of the image quality. Experimental results show that this method can obtain sensitive matrix of image quality correction of projection lithography machine with high accuracy and efficiency.