基于共振异常的消偏振型窄带滤波器分析

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亚波长光栅因光栅参量的不同而具有不同的衍射特性 ,通过对亚波长光栅参量的合理设计来实现消偏振窄带滤波是一种新的方法与途径。首先分析了基于共振异常的窄带滤波的物理机制及存在条件 ,讨论了二维亚波长光栅实现消偏振窄带滤波的可能性。然后 ,利用严格模式理论进行了计算模拟 ,其计算结果与导波理论所得结果基本吻合 ,其衍射特性表现出周期性共振异常 敏感的角度依赖性和波长依赖性。最后 ,讨论了由工艺误差对滤波特性所带来的影响 ,为具体工艺制作提供了一定的指导。 The subwavelength grating has different diffraction characteristics due to the different grating parameters. A depolarization narrowband filter is a new method and approach by reasonably designing the subwavelength grating parameters. Firstly, the physical mechanism and existing conditions of narrowband filtering based on resonance anomalies are analyzed. The possibility of realizing depolarization narrowband filtering in two-dimensional subwavelength grating is discussed. Then, the simulation is carried out by using rigorous mode theory. The calculation results are in good agreement with those obtained by the guided wave theory. The diffraction characteristics show the angular dependency and wavelength dependence of the periodic resonance anomaly. Finally, the influence of the process error on the filter characteristics is discussed, which provides some guidance for the specific process.
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