基于国内外薄膜材料杨氏模量测试的最新研究进展,系统地综述了近年来薄膜材料杨氏模量的测量方法,包括共振法、纳米压痕法、动态膨胀法以及视觉图像跟踪系统与微拉伸复合法等,并对这些测试方法的基本原理、研究现状及存在的问题做了简要介绍。在这些方法中纳米压痕法和共振法是相对准确而且普及的测量方法。当薄膜厚度减小到纳米量级时,纳米压痕法将达到测试的极限。共振法对于器件的加工工艺有一定的依赖,但辅以其他相关纠正技术将来有望成为测试纳米级薄膜杨氏模量的标准方法。 Based on the latest research progress of Young’s modulus measurement of thin film materials at home and abroad, the methods of measuring Young’s modulus of thin film materials in recent years are systematically reviewed, including resonance method, nanoindentation method, dynamic expansion method and visual image tracking system. Stretching compound method, and the basic principles of these test methods, research status and existing problems are briefly introduced. Nanoindentation and resonance methods in these methods are relatively accurate and popular measurement methods. When the film thickness is reduced to nanometer scale, the nanoindentation method will reach the limit of testing. Resonance method for the processing of the device has a certain dependence, but supplemented by other corrective technology in the future is expected to become a standard method of testing the Young’s modulus of nano-scale film.