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超高宽深比结构氮化硅波导具有低损耗和高偏振消光比的优异性能,是抑制集成光学陀螺中偏振噪声的可行性方案。文章基于FEM和FDTD方法对氮化硅波导的模场分布、弯曲损耗及光纤插入损耗进行了仿真分析,通过对波导截面结构的设计优化,并采用LPCVD和RIE微纳工艺在石英基底上成功制备了宽深比高达100的单模氮化硅波导。表征及通光测试验证了工艺可行性,对一长为12mm的氮化硅直波导测试得偏振消光比达3dB。研究结果对超高宽深比氮化硅波导在集成光学陀螺及相关偏振器件中的应用研究具有一定意义。
The excellent performance of low loss and high polarization extinction ratio of the ultrahigh-width-to-deep-ratio silicon nitride waveguide is a feasible solution to suppress the polarization noise in the integrated optical gyroscope. Based on FEM and FDTD methods, the field distribution, bending loss and insertion loss of silicon nitride waveguide are simulated and analyzed. The design of waveguide cross-section structure is optimized, and the LPCVD and RIE micro-nano process are successfully prepared on quartz substrate A single-mode silicon nitride waveguide with a width-depth ratio of up to 100. Characterization and light-passing test to verify the feasibility of the process, a length of 12mm of silicon nitride straight waveguide polarization extinction ratio of up to 3dB. The research results have some significance to the application research of ultra-high-width-to-deepness ratio silicon nitride waveguide in integrated optical gyro and related polarization devices.