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报道了一个与Nicolet 200SXV傅里叶变换光谱仪联用的可同时测定半导体样品中浅施主和浅受主杂质浓度的实验装置,介绍了用该装置同时测定硅样品中杂质硼和磷浓度的实验。
An experimental set-up for the simultaneous determination of shallow donor and shallow acceptor impurity concentrations in semiconductor samples in conjunction with the Nicolet 200SXV Fourier Transform Spectrometer is reported. The simultaneous determination of boron and phosphorus in silicon samples using the same device is described.