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采用ＣＨ４／ＣＦ４ 混合气体等离子体来处理ＰＥＴ表面． 利用变角ＸＰＳ研究改性后ＰＥＴ的表面改性层的组分随取样深度的变化． 结果表明， 碳氟混合气体等离子体在ＰＥＴ表面形成交联网络结构的改性层， 改性层的化学组成随深度的变化不大； 纯ＣＦ４ 等离子体的改性层的化学组成不均匀， 含氟基团主要分布在外面． 不同混合气体等离子体在ＰＥＴ表面形成改性层的结构决定于ＣＨ４ 的添加量
The CH4 / CF4 mixed gas plasma was used to treat the PET surface. The variation of the composition of the modified surface layer of the modified PET with the sampling depth was studied by using the variable angle XPS. The results show that the plasma of the fluorocarbon mixed gas forms a modified layer of cross-linked network structure on the surface of PET, and the chemical composition of the modified layer changes little with the depth; the chemical composition of the modified layer of pure CF4 plasma is not uniform, Fluorine groups are mainly distributed on the outside. The structure of different mixed gas plasma modified layer formed on PET surface is determined by the amount of CH4 added