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阐述了工序能力指数(Cpk)的理论原理及计算方法。通过对某带通滤光片截止区域截止点所在波长位置的统计分析,从截止点(透过率T为5%的点)的分布情况,计算分析得出其Cpk值主要在1.0~1.33之间。提出了有效提高滤光片镀膜工序能力指数的方法和途径,包括减小参数分布的标准偏差δ、优化调整工艺条件,以及尽可能减小工艺参数分布中心μ与规范中心值T0之间的偏离等。
The theoretical principle and calculation method of process capability index (Cpk) are expounded. Through the statistical analysis of the wavelength of the cut-off point of the cut-off area of a band-pass filter, the Cpk value of the cut-off point (the point of 5% of transmittance T) is calculated and analyzed to be 1.0 to 1.33 between. The methods and ways of effectively increasing the capability index of the filter coating process are proposed, including reducing the standard deviation δ of the parameter distribution, optimizing the process conditions, and minimizing the deviation between the process parameter distribution center μ and the standard center value T0 Wait.