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本文提供了利用調制光与电流間的相位检波来测定半导体中非平衡載流子寿命的实驗装置。对这样一种新的寿命测量方法作了肯定的实驗驗証,分析了两种实驗装置的优缺点。对調制光源自身弛豫时間給予测得寿命值的影响进行了討论,有关实驗结果与分析有良好的吻合。通过有关实驗証实了本文所闡述的方法具有测量重复性好、精确度高、有较宽广的測量范圍、設备简便等显著特点,既宜于进行复合研究,也适用于器件与材料生产中的样品檢驗。
This article provides an experimental setup for measuring the lifetime of non-equilibrium carriers in semiconductors using phase detection between modulated light and current. This new life-span measurement method was verified experimentally and the advantages and disadvantages of the two experimental devices were analyzed. The influence of the measured relaxation time on the measured lifetime of the modulated light source is discussed. The experimental results are in good agreement with the analysis. The experiment shows that the method described in this paper has the characteristics of good repeatability, high precision, wide measuring range, simple equipment and so on. It is not only suitable for composite research, but also for the production of devices and materials Sample test.