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研究4种不同气氛下制备的可应用于MEMS方面的超纳米金刚石薄膜的显微力学特征。利用纳米压痕技术得到样品的加载-卸载曲线及硬度和弹性模量随压入深度的变化关系。结果表明,无Ar条件下制备的薄膜具有最好的弹性回复能力、最高的硬度(72.9 GPa)和弹性模量(693.7 GPa)。同时低Ar含量更有利于提高薄膜的硬度和弹性模量。以上结果说明无Ar或低Ar含量更有利于提高纳米金刚石薄膜的力学性能,以更好地应用于MEMS方面。
The micromechanical characteristics of the nanostructured nanostructured diamond films fabricated under four different atmospheres were investigated. The loading-unloading curve and the relationship between hardness and elastic modulus with depth of press-in were obtained by nanoindentation technology. The results show that the films prepared without Ar have the best elastic recovery, the highest hardness (72.9 GPa) and the elastic modulus (693.7 GPa). At the same time low Ar content is more conducive to improving the film hardness and elastic modulus. The above results show that no Ar or low Ar content is more conducive to improving the mechanical properties of nano-diamond films to better apply to MEMS.