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概述了金刚石膜的发展过程及近年来的发展趋势.阐述了有关的生长机制.对生长金刚石膜非常重要的几个问题有,提高金刚石成份的生长率;稳定金刚石结构,并清洗掉不需要的石墨,引入氢,控制其浓度;或以某种形式赋予石墨以一定能量,使其转变为金刚石.简单的介绍了化学输运过程方法和等离子体动力学方法,总结了研究中已经解决的问题和尚不清楚的问题.收集和整理了金刚石,金刚石膜和类金刚石的性能,进行了对比,并将金刚石膜与一些电子材料进行了比较,最后简述了可能的应用.人造金刚石膜具有优越的性能,这是任何其它材料无法与之比拟的,同时它的造价低廉,因此美国纽约时报惊呼,人造金刚石膜已为电子学、光学、机械加工、化学工业和军事科学开辟了一个新纪元.目前金刚石膜的研制使得东西方的科学家极为振奋,在日本、美国和苏联正在兴起“金刚石热”.
The development of diamond films and their development trend in recent years are summarized, and the relevant growth mechanisms are elaborated. Several problems which are very important for the growth of diamond films include: increasing the growth rate of diamond; stabilizing the diamond structure and cleaning away unwanted Graphite introduces hydrogen to control its concentration, or some form of graphite gives it some energy to transform it into diamond. A brief introduction to the chemical transport process and the plasma-kinetic method is given to summarize the problems that have been solved in the study Monk unclear issues.Collected and collated the diamond, diamond film and diamond-like performance, compared diamond films and some electronic materials were compared, and finally outlined the possible applications.Man-made diamond film has superior Performance, which no other material can match, and its low cost, the New York Times exclaimed that artificial diamond films have opened up a new era for electronics, optics, machining, chemical industry and military science. The development of diamond film makes the East-West scientists extremely excited, in Japan, the United States and the Soviet Union are emerging “ Diamond hot. ”