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本文通过大量实验,对在不同pH值的水溶液中和当水溶液的氢离子活度发生变化时,Si_3N_4膜pH-ISFET的敏感膜与溶液界面电势差的响应过程进行了深入的研究。实验结果表明,Si_3N_4膜pH-ISFET存在着严重的滞后效应,所谓滞后效应是指当溶液的pH值发生变
In this paper, a large number of experiments were conducted to investigate the response of the interface potential difference between the sensitive membrane and the solution of Si_3N_4 membrane pH-ISFET in different pH aqueous solution and when the hydrogen ion activity of aqueous solution changed. The experimental results show that there is a serious hysteresis effect in Si_3N_4 membrane pH-ISFET. The so-called hysteresis effect means that when the pH value of the solution changes