以硫系玻璃为基底,根据膜系设计理论,结合软件完成了短中波红外减反膜的设计。通过对材料热应力的计算分析,研制了一种混合材料M-11作为连接层,优化了沉积工艺参数,并根据其力学特性修正膜系结构,解决了硫系玻璃的脱膜问题。光谱测试结果表明,该膜层在1.4~2.5μm和3.5~4.5μm波段透过率分别为95.8%、96.7%,满足红外成像系统的使用要求。 According to the design theory of membrane system and the software, the design of short-wave infrared anti-reflection film was completed based on sulfur-based glass. Through the calculation and analysis of the thermal stress of the material, a mixed material M-11 was developed as the connecting layer to optimize the deposition process parameters and modify the membrane structure according to its mechanical properties to solve the problem of stripping the sulfur-based glass. The results of spectral test showed that the transmittance of the film in the wavelength range of 1.4 ~ 2.5μm and 3.5 ~ 4.5μm were 95.8% and 96.7% respectively, which satisfied the requirements of infrared imaging system.