利用热丝化学气相沉积法,在真空腔中通过选择设定不同加热功率的热丝热解硅烷制备出一系列不同颗粒尺寸的硅纳米颗粒样品。透射电镜分析表明硅纳米颗粒具有结晶良好的纳晶结构。通过自然氧化钝化硅纳米颗粒表面,消除表面悬键的影响,使得硅颗粒具有高效的光致发光特性,发光范围在红光到近红外区,发光特性与量子限域效应相吻合。发光寿命测量表明所制备的硅颗粒的发光寿命在微秒量级,并且通过比较不同硅颗粒分布样品中相同发光波长衰减寿命的差异,揭示了所制备样品中硅纳米颗粒之间存在耦合作用。 A series of silicon nanoparticle samples with different particle sizes were prepared by hot filament chemical vapor deposition in a vacuum chamber by selecting hot filament pyrolysis silanes with different heating powers. Transmission electron microscopy showed that the silicon nanoparticles have well-crystallized nanocrystalline structure. Through the natural oxidation of silicon nanoparticles surface passivation, the elimination of surface dangling bonds, making the silicon particles with high photoluminescence properties, the light emission in the red to the near infrared region, the light-emitting properties and quantum confinement effect. Luminescence lifetime measurements show that the luminescent lifetime of the prepared silicon particles is on the order of microseconds, and the difference in the decay lifetime of the same luminescence wavelength in different silicon particle distribution samples reveals the coupling effect between the silicon nanoparticles in the prepared sample.