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现代制造技术正朝着产品小型化和加工过程微型化的方向不断发展,用于加工微型零件的材料越来越难加工,对加工精度的要求也越来越高,当前微细加工技术面临巨大挑战.近十几年来,微磨料水射流加工技术(射流直径10~100μm)快速发展,已实现对金属、陶瓷、光学玻璃、半导体以及复合材料等难加工材料的精密微细加工,其加工精度和表面质量已达到激光加工水平,是一种具有广阔应用前景的新型微细加工技术.为进一步了解该项技术的最新发展动态,本文介绍了微磨料水射流加工技术的基本原理、研究现状以及未来的发展趋势.
Modern manufacturing technology is moving toward the miniaturization of products and the miniaturization of processing. The materials used for processing miniature parts are harder and harder to process, and the requirements for processing precision are also getting higher and higher, and the current micro-processing technologies are facing great challenges In recent ten years, the micro-abrasive water jet processing technology (jet diameter 10 ~ 100μm) rapid development has been achieved on the metal, ceramic, optical glass, semiconductors and composites and other difficult materials precision machining, the machining accuracy and surface The quality has reached the level of laser processing is a new type of micro-processing technology with broad application prospects.To further understand the latest developments of the technology, this paper introduces the basic principles, research status and future development of micro-abrasive water jet processing technology trend.