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通过锌膜在金属锌熔点以上的温度退火氧化的方法制备ZnO薄膜,研究了氧气压力对ZnO薄膜发光性能的影响。ZnO薄膜的室温光致发光谱是由发光中心在413nm~424nm处的单一紫光组成。随着氧气压力的增加,紫光的强度增加并且发光中心由424nm偏移到413nm。在低氧气压力下(50 Pa~500Pa),紫光的发射归因于电子从价带到锌间隙原子(Zni)之间的跃迁。在高氧气压力下(5000Pa~23000Pa),锌间隙原子(Zni)和锌空位(VZn)缺陷都和紫光发射有关。
ZnO thin films were prepared by the annealing annealing at a temperature above the melting point of zinc metal, and the effect of oxygen pressure on the luminescent properties of ZnO thin films was investigated. The room-temperature photoluminescence spectra of ZnO films consist of a single violet light with luminescence at 413nm ~ 424nm. As the oxygen pressure increases, the intensity of the violet light increases and the luminescence center shifts from 424 nm to 413 nm. Under low oxygen pressure (50 Pa ~ 500 Pa), the emission of violet light is attributed to the transition from the valence band to the zinc interstitial atom (Zni). Under high oxygen pressure (5000Pa ~ 23000Pa), the defects of zinc interstitial (Zni) and zinc vacancy (VZn) are related to violet emission.