用计算机研究并给出了深蚀刻二元光学元件制作误差对衍射效率影响的规律；将深刻蚀二元光学元件与一般二元光学元件制作误差规律的不同之处进行了分析说明；提出了深刻蚀二元光学元件制作误差规律的经验公式 The law of the influence of fabrication error of deep-etched binary optical element on the diffraction efficiency was studied and given by computer. The differences between the errors of fabrication of deep-etched binary optical element and general binary optical element were analyzed and explained. Experience formula of error of etching binary optical components