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采用信号处理的方法对激光干涉测角系统的特性进行线性化处理,需要产生两路正交信号。采用空间互相垂直的两套干涉系统获得信号难免会使系统复杂、调整困难,因此提出了一种插值处理方法,可以利用测量得到的一路信号获得线性输出信号。输出信号的非线性误差较处理前大大减小了,但是无法满足高精度测量的要求。还提出了针对误差产生的原因进行的误差补偿技术。实验结果表明,提出的方法可以实现任意转角的高精度测量,光程差的测量误差小于±0 2μm,对应的转角测量误差为0 63″。
The signal processing method is used to linearize the characteristics of the laser interferometry goniometer system, and two orthogonal signals need to be generated. Using two sets of interfering systems with perpendicular space to each other to obtain signals will inevitably make the system complicated and difficult to adjust. Therefore, an interpolation method is proposed to obtain the linear output signal by using the measured signals. The nonlinear error of the output signal is greatly reduced compared with before processing, but can not meet the requirements of high-precision measurement. Also proposed error compensation for the reasons for the error compensation technology. The experimental results show that the proposed method can achieve high-precision measurement of any corner, the measurement error of optical path difference is less than ± 0 2μm, and the corresponding error of angle measurement is 0 63 ".