研究了两种器件结构(共平面和三明治)对金刚石薄膜辐射探测器性能的影响。研究表明,共平面结构器件在 241Am 5．5MeVα粒子辐照下的计数率、电荷收集效率、响应电流和能量分辨率等性能参数均优于三明治结构。Raman散射 测试表明,造成上述结果主要是由于金刚石薄膜的成核边和生长边具有不同的微结构特征而引起。 The effects of two device structures (coplanar and sandwich) on the performance of diamond thin film radiation detectors were investigated. The results show that the performance parameters of the coplanar devices such as counting rate, charge collection efficiency, response current and energy resolution under 241Am 5.5MeVα particle irradiation are better than the sandwich structure. The Raman scattering test shows that the above results are mainly caused by the different microstructural features of the diamond nucleation and growth edges of diamond films.