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MEMS技术的进一步发展依赖于MEMS器件计算机辅助设计的发展和水平的提高。系统级仿真和多能量场耦合是MEMS器件计算机辅助设计的核心环节。提出了一种MEMS器件设计的参考方法,并对系统级仿真这一难点做了深入阐述。
The further development of MEMS technology relies on the development and level of computer aided design of MEMS devices. System-level simulation and multi-energy field coupling are the core of computer-aided design of MEMS devices. A reference method of MEMS device design is proposed, and the difficulty of system-level simulation is expounded.