激光束质量实时测量技术

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提出一种新型光束质量实时测量技术,该技术主要基于由平板反射镜组成的多平面成像系统,一次性将激光束腰附近2倍瑞利距离内的多个光斑成像在同一个平面上,用CCD相机获取这些光斑的光强分布图样。通过图像处理获知接收到的光斑的光强分布。采用远场发散角、焦点尺寸、桶中功率比和M2因子四种光束质量评价标准对激光光束质量进行评价。利用该方法实时测量了高能钕玻璃双板条激光器的输出光束。 A new beam quality real-time measurement technique is proposed. The technique is mainly based on a multi-plane imaging system consisting of flat reflectors. Multiple spots within a 2-fold Rayleigh distance near the laser beam waist are imaged on the same plane at one time. CCD camera to obtain the light intensity distribution pattern of these spots. The light intensity distribution of the received light spot is known by image processing. The laser beam quality was evaluated by using the far-field divergence angle, focal spot size, barrel power ratio and M2 beam quality evaluation criteria. Using this method, the output beam of high energy neodymium glass double slab laser was measured in real time.
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