【摘 要】
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The research and development history of silicon Neutron Transmutation Doping (NTD) technology and its applications at home and abroad are introduced in this pap
【出 处】
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Engineering Sciences
论文部分内容阅读
The research and development history of silicon Neutron Transmutation Doping (NTD) technology and its applications at home and abroad are introduced in this paper.The advantages of NTD,compared with conventional technology of doping,are narrated.The principle of NTD as well as the implementation of the main procedures related to Si NTD is explained.The market demand tendency is prospected,and the advanced measures on NTD quality control are described.
The research and development history of silicon Neutron Transmutation Doping (NTD) technology and its applications at home and abroad are introduced in this paper. Advantages of NTD, compared with conventional technology of doping, are narrated. The principle of NTD as well as the implementation of the main procedures related to Si NTD is explained. The market demand tendency is prospected, and the advanced measures on NTD quality control are described.
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