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研究了不同模式光斑对四象限探测器(QD)工作的影响,重点分析了高斯光斑对探测灵敏度的影响。搭建实验系统用扫描偏转镜及辅助CCD相机完成了对其性能测试实验。实验表明,形心算法的检测精度为质心检测精度的5倍;在极限探测灵敏度下,QD只能实现二细分,采用平滑滤波可以改善其细分能力;在高信噪比条件下可实现位置分辨力为1.6μm,角度分辨率为0.8μrad。同时研究了不同光斑大小、不同强度背景光对器件的影响。
The effect of different modes of light spot on the work of four-quadrant detector (QD) was studied. The influence of Gaussian spot on the detection sensitivity was analyzed. Set up experimental system with scanning deflection mirror and auxiliary CCD camera to complete its performance test experiment. Experiments show that the detection accuracy of centroid algorithm is five times of that of centroid detection. Under limit detection sensitivity, QD can only achieve two subdivisions, and smooth filtering can improve its subdivision ability. Under high signal-to-noise ratio Position resolution of 1.6μm, angular resolution of 0.8μrad. At the same time, the effects of different light spot sizes and different intensities of background light on the device are studied.