1 nm roughness value of silicon surface by diamond turning is obtained firstly and three novel techniques are proposed. The surface integrity is studied in detail by using atomic force microscope, scanning electron microscope, and stylus surface instrument. The diamond tool sharpness hasa considerable influence on the machined surface, therefore a novel technique-brightness modulation for measuring accurately the edge of the cutter is proposed. Mirror surfaces are assessed by another novel technique-a measure of their reflectivity. A third technique, single grit diamond machining is carried out. It supplies a experimental evidence for verifying the obtained high quality turned surfaces.