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用电子能谱研究了蒸发制备的氧化铟薄膜在空气中退火前后的特性。结合电镜观测,表明蒸发膜中的金属铟粒经退火后基本消除,薄膜透射率明显提高。
The characteristics of evaporated indium oxide film before and after annealing in air were studied by electron spectroscopy. Combined with electron microscope observation, it is shown that the indium metal particles in the evaporation film are basically eliminated after annealing, and the transmittance of the film is obviously increased.