光栅拼接是解决光栅口径限制的一种有效途径,而光栅拼接的难点是子光栅的精密调整和稳定性保持。为实现子光栅的精密调整,采用了差动螺纹和压电驱动器两级驱动调整机构,子光栅调整精度可达纳米量级;为提高光栅拼接架结构稳定性,对影响光栅拼接架结构稳定性的因素进行了理论分析,根据分析结果,设计了新型的光栅拼接架,采用整体式支撑结构以提高光栅拼接架的固有频率,用柔性铰链代替弹簧以提高子光栅与光栅支撑架的联接刚度,光栅拼接架的稳定性得到大幅提高。经实验测试,拼接架的稳定时间超过1h,子光栅间相对位移标准差为35.7nm,拼接架满足使用要求。 Grating splicing is an effective way to solve the grating aperture limitation, and the difficulty of grating splicing is the sub-grating precision adjustment and the stability preservation. In order to realize the precise adjustment of the sub-grating, two-stage drive adjustment mechanism of differential thread and piezoelectric actuator is adopted, and the sub-grating adjustment accuracy can reach the order of nanometers. In order to improve the structural stability of the grating splice holder, According to the analysis results, a new type of raster splicing frame is designed. The integral support structure is adopted to improve the natural frequency of the raster splicing frame, the flexible hinge is used instead of the spring to improve the connection rigidity between the sub-grating and the raster support frame, Raster splicing rack stability has been greatly improved. The experimental test, the stitching frame stability time of more than 1h, the relative displacement between the sub-grating standard deviation of 35.7nm, splicing frame to meet the requirements.