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脉冲激光溅射镀膜是一种高质量的薄膜制备技术,本文研究分别以SnO2和纯锡作靶,用此技术生长的SnO2膜的结构及对氢、乙醇的气敏性,探索将此技术应用于气敏膜制备的途径。
Pulsed laser sputtering coating is a kind of high quality thin film preparation technology. In this paper, SnO2 and pure tin as the target, the structure of the SnO2 film grown by this technique and the gas sensitivity to hydrogen and ethanol were explored. The application of this technique Means of gas sensitive membrane preparation.