采用溶胶-凝胶法,以钛酸四丁酯(Ti(OC4H9)4)和硝酸铝(Al(NO3)3.9H2O)为前驱体,乙醇为溶剂,利用硝酸铝中所含的结晶水进行水解反应,制备了适于镀膜的钛酸铝溶胶。利用旋转粘度计、光学显微镜和SEM研究了水解抑制剂种类及用量、pH值、前驱体浓度、陈化时间等因素对镀膜效果的影响。在此基础上,采用浸渍-提拉法经过三次镀膜在碳化硅基片上成功制备出均匀、致密的钛酸铝薄膜。 Sol-gel method was used to hydrolyze tetrabutyl titanate (Ti (OC4H9) 4) and aluminum nitrate (Al (NO3) 3.9H2O) using ethanol as solvent and using crystal water contained in aluminum nitrate Reaction, prepared suitable for coating aluminum titanate sol. The effects of the type and amount of hydrolysis inhibitor, pH value, precursor concentration, aging time and other factors on the coating effect were investigated by rotational viscometer, optical microscope and SEM. On this basis, a uniform and dense aluminum titanate film was successfully prepared on the silicon carbide substrate by immersion-pulling method after three times plating.