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论述了声表面波压力传感器的工作原理及设计方法,报导了研究结果:传感器在0～100kPa范围内具有良好的线性;其中一阶压力灵敏度为0.55×10~(-9)/(Pa·cm~(-2))。
The working principle and design method of SAW pressure sensor are discussed. The research results are reported: the sensor has a good linearity in the range of 0 ~ 100kPa; the first-order pressure sensitivity is 0.55 × 10 -9 / Pa · cm ~ (-2)).