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最新的硅加速度传感器是采用三维微细加工工艺制成的半导体器件。它包括敏感部分、电桥部分及信号处理部分,它代表当代硅加速度传感器的新技术。第二次世界大战时期,飞机上装备的加速度计是由一个能在框架里移动的质量块及两根弹簧组成,其结构示意图如图1所示。在飞行方向有加速度时,质量块在框架里移动,移动的距离与加速度成比例,由指针来指示:若用电位器的
The latest silicon acceleration sensor is a three-dimensional microfabrication process made of semiconductor devices. It includes the sensitive section, the bridge section and the signal processing section, which represents a new technology for contemporary silicon accelerometers. During the Second World War, the accelerometer equipped on the aircraft was composed of a mass moving in the frame and two springs, and its structure diagram is shown in FIG. 1. In the flight direction of acceleration, the mass moves in the frame, moving distance and acceleration proportional to the pointer to indicate: If the potentiometer