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该所为长春半导体厂引进的美国瓦里安公司的200—DF4型离子注人机安装、维修、调试获得成功。“六五”期间,我国半导体行业先后从国外引进了50多台离子注入机,其中有一些是国外淘汰翻新的旧设备。长春半导体厂也引进了一台美国瓦里安公司生产的200—DF_4型中能离子注入机。该机为生产线上撤下来的旧产品(已使用了近2万小时)加上包装运输不当,机械部件严重损坏,不少电气部件也不正常。请外国人来维修、装调,
The Institute for the introduction of Changchun Semiconductor Plant Varian company 200-DF4 ion implantation machine installation, maintenance, commissioning success. During the “Sixth Five-Year Plan” period, China’s semiconductor industry introduced more than 50 ion implanters from abroad, of which some were old equipment that were eliminated and refurbished abroad. Changchun Semiconductor Plant also introduced a US Varian company’s 200-DF_4-type ion implanter. The machine for the production line removed from the old product (which has been used for nearly 20,000 hours) plus the packaging and transportation is not properly damaged serious mechanical parts, many of the electrical components are not normal. Please foreigners to repair, install tune,