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设计并实现了一种采用进口电火花技术加工的D波段电感膜片耦合的矩形波导空腔滤波器。采用等效电路法设计了一个140 GHz矩形空腔带通滤波器。采用有限元仿真软件HFSS分析了腔体个数对滤波器主要性能的影响,最终成功设计了一个性能优良的四阶空腔滤波器,中心频率(140±3)GHz,带内插入损耗S21在-3 d B以内,回波损耗S11在-20 d B以下。采用电火花微加工技术成功加工出了四阶滤波器的主体部分,相应完成了结构键合等关键工艺,首次制作了基于电火花技术的D波段矩形波导空腔滤波器。测试结果为中心频率(138.5±3)GHz,带内插入损耗最好达到了-4.4 d B。结果表明滤波器在140GHz具有带通特性和滤波功能,尽管与理论上的-3 d B有差异,但考虑到加工误差、夹具损耗等情况下,样品主要技术指标与设计值较为一致。
A rectangular waveguide cavity filter coupled with D-band inductances is fabricated and implemented using imported spark spark technology. Equivalent circuit method is used to design a 140 GHz rectangular cavity bandpass filter. The finite element simulation software HFSS was used to analyze the influence of the number of cavities on the main performance of the filter. Finally, a fourth-order cavity filter with excellent performance was successfully designed. The center frequency (140 ± 3) GHz, in-band insertion loss S21 Within -3 d B, return loss S11 is below -20 d B. The main part of the fourth-order filter was successfully fabricated by EDM micro-machining technology, and the key processes such as structural bonding were completed. The D-wave rectangular waveguide cavity filter based on EDM was fabricated for the first time. Test results for the center frequency (138.5 ± 3) GHz, the best in-band insertion loss reached -4.4 d. The results show that the filter has band-pass characteristic and filtering function at 140GHz. Although it has a difference from theoretical -3d B, the main technical specifications of the sample are in good agreement with the design values, taking into account the machining errors and fixture loss.