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研究了冷阴极潘宁离子源的磁路设计。在简要叙述冷阴极潘宁离子源的基本原理及其对磁场要求的基础上 ,考虑了在设计冷阴极潘宁离子源磁路时的关键问题和解决方法 ,并给出了实验结果和分析结论。
The design of the magnetic circuit of cold cathode Penning’s ion source was studied. Based on the brief introduction of the basic principle of the cold cathode Penning ion source and its requirements on the magnetic field, the key problems and solutions in the design of the cold cathode Penningon source magnetic circuit are considered. The experimental results and the analysis results are also given .