SiHCl_3经精馏提纯可作为半导体多晶硅的原料。为确保硅的质量,必须对精馏料中杂质硼进行分析和控制。通常试样在氮气保护下挥发掉基体使硼得到富集,然后用化学光谱法测定。资料介绍挥发时为防止硼的损失,要求加络合剂三苯基氯甲烷或乙腈。我们在试验中发现:不加络合剂并不影响测定结果,见表1。其原因从下面二个方面进行讨论: SiHCl_3 purified by distillation can be used as semiconductor polysilicon raw materials. In order to ensure the quality of silicon, impurity boron in the distillate must be analyzed and controlled. Normally, the sample volatilizes out of the substrate under a nitrogen blanket to enrich the boron, and then is measured by chemical spectroscopy. Information on the introduction of volatility to prevent the loss of boron, requiring complexing agent triphenyl chloride or acetonitrile. We found in the experiment: no complexing agent does not affect the determination results, Table 1. The reason is discussed from the following two aspects: