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利用负偏压增强热丝化学气相沉积系统在沉积有过渡层Ta和催化剂层NiFe的Si衬底上制备出准直碳纳米管,并用扫描电子显微镜研完了它们的生长和结构,结果表明辉光放电和压强对其生长和结构有极大的影响。若无辉光放电产生,碳纳米管是弯曲的,有辉光放电时,碳纳米管是准直的。当压强较大时,准直碳纳米管较容易生长,并且随着压强的减小,其平均直径减小和平均长度增大。但压强为5Pa时,准直碳纳米管却不能够生长。最后,分析和讨论了辉光放电和压强对准直碳纳米管生长和结构的影响。
Aligned carbon nanotubes were prepared on a Si substrate deposited with a transition layer Ta and a NiFe catalyst layer by using a negative bias enhanced hot filament CVD system and the growth and structure of the aligned carbon nanotubes were investigated with a scanning electron microscope. The results showed that the glow Discharge and pressure have a huge impact on its growth and structure. If no glow discharge occurs, the carbon nanotubes are curved, and when the glow discharge occurs, the carbon nanotubes are collimated. When the pressure is higher, the aligned carbon nanotubes are easier to grow, and as the pressure decreases, the average diameter decreases and the average length increases. However, when the pressure is 5 Pa, the aligned carbon nanotubes can not grow. Finally, the effects of glow discharge and pressure on the growth and structure of straight carbon nanotubes were analyzed and discussed.