介绍了一种两级复眼式均束器的设计。它不仅均匀效果好，传输效率高，输出光束截面尺寸连续可调，而且为掩模投影式准分子激光微加工系统提供了恰当的照明数值孔径，是准分子激光进行微机械、微光学、微电子等微细加工的优良照明系统。 The design of a two-stage fly-eye homogenizer is introduced. The invention not only has the advantages of uniform effect, high transmission efficiency and continuously adjustable output beam cross-sectional size, but also provides appropriate illumination numerical aperture for the mask projection type excimer laser micro-machining system. The invention is an application of an excimer laser for micro-mechanics, micro-optics, Electronic and other fine processing of the fine lighting system.