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在制造1.5μm的CMOS集成电路过程中,采用双层金属处理所得到的MCM6287和MCM6288 64K位静态RAM的存取时间仅25毫微秒。6287门排列成64K×1位RAM,6288门则具有16K×4位的结构。MCM6268作为4K×4位的模式也很有用。在双层金属处理过程中没有加入硅化物。
The MCM6287 and MCM6288 64Kbit static RAMs accessed with the two-layer metallization have a mere 25 nanosecond access time in manufacturing 1.5μm CMOS ICs. 6287 doors arranged in 64K × 1 RAM, 6288 door has a 16K × 4-bit structure. The MCM6268 is also useful as a 4K × 4-bit mode. No silicide was added during double layer metal processing.