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利用等离子源离子注入 (PSII)技术对冷作模具钢材料Crl2MoV进行不同温度范围的处理 ,研究了温度在离子注入中对材料表面改性的影响。首先 ,在参数 (如能量、剂量等 )相同条件下 ,改变脉冲频率 ,即相对应地改变样品的表面温度对不同样品进行试验对比 ,分别测试其表面温度为 :2 5 0℃、31 2℃、36 5℃、41 2℃、471℃。然后在 31 2℃的温度条件下 ,分别做了不同剂量的试验。用X射线衍射分析 (XRD)表面结构、晶相变化 ;用俄歇电子能谱 (AES)分析注入氮的浓度分布 ;用维氏显微硬度计测定其显微硬度 ;用针一盘磨损机测试其耐磨性能。结果表明 ,对Cr1 2MoV材料PSII表面温度效应明显提高试样的表面显微硬度及耐磨性能 ,同时根据实验结果得出了该种材料的等离子体源离子注入的最佳工艺参数。
The effects of temperature on the surface modification of materials were studied by using plasma source ion implantation (PSII) technology at different temperature ranges for cold working die steel Crl2MoV. First, under the same conditions of parameters (such as energy, dose, etc.), the pulse frequency is changed, that is, the surface temperature of the sample is changed correspondingly to test the different samples. The surface temperatures of the samples are respectively tested as follows: 36 5 ° C, 41 2 ° C, 471 ° C. Then at 31 2 ℃ temperature conditions, respectively, made different doses of the test. X-ray diffraction (XRD) analysis of the surface structure and crystal phase changes; concentration distribution of nitrogen implanted by Auger electron spectroscopy (AES); measurement of microhardness with a Vickers microhardness tester; Test its wear resistance. The results show that the surface temperature effect of PSII on Cr1 2MoV material significantly improves the surface microhardness and wear resistance of the sample, and at the same time, the optimum process parameters for plasma source ion implantation of the material are obtained according to the experimental results.