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用射频(rf)溅射法,在辉钼矿单晶和钢两种底材上沉积了MoS_2膜。以评价不同制备条件对膜性质的影响。然后用角分辨光电子能谱对样品进行测试,在以下几方面提供了信息:层状晶体基面的取向,紧靠底材的膜层(在1～10nm以内)和由较大的微晶组成的厚一些的宏观膜。(大约70～200nm)对于沉积在晶体基面上厚4.3nm的膜来说,其光电子发射对角度的依赖关系跟底材的一样,这就说明在这些膜内择优取向。对于在钢底材上厚一些的膜,所作的角分布研究结果跟先前的俄歇电子能谱的结果一致,因而证实润滑膜因取向不同而在它上面出现不同厚度的氧化物膜。对角度的依赖关系的数据跟描述膜表面的组成和结构的模型相吻合。
MoS 2 films were deposited on both molybdenum single crystal and steel substrate by radio frequency (rf) sputtering. To evaluate the different preparation conditions on the membrane properties. The samples were then tested using angle-resolved photoelectron spectroscopy to provide information on the orientation of the lamellar crystal base, the layer immediately below the substrate (within 1 to 10 nm) and the larger crystallites Thicker macro film. (About 70-200 nm) For films deposited at a thickness of 4.3 nm on the crystal base, photoelectron emission has a diagonal dependence on the substrate, indicating the preferred orientation within these films. For the thicker film on the steel substrate, the results of the angular distribution were consistent with those of the previous Auger electron spectroscopy, thus confirming the different thickness of the oxide film on the lubricating film due to the different orientation. The angular dependence of the data matches the model describing the composition and structure of the membrane surface.