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氧化氮(NO_x)是重要的大气污染成分之一,目前检测污染源NO_x含量的主要手段是化学发光分析法。新型NO_x气敏传感器可包括利用TiO_2,WO_3等氧化物半导体及金属酞菁聚合物半导体的电导型气敏传感器,利用金属酞菁为气敏吸附膜的声表面波(SAW)气敏传感器和利用硝酸盐或亚硝酸盐为气敏固态电解质的电化学传感器。
Nitric oxide (NO_x) is one of the most important air pollution components. Currently, the primary means of detecting the NO_x content of pollution sources is chemiluminescence analysis. The new NO_x gas sensor may include a conductivity type gas sensor using an oxide semiconductor such as TiO 2 or WO 3 and a metal phthalocyanine polymer semiconductor, a surface acoustic wave (SAW) gas sensor using a metal phthalocyanine as a gas-sensitive adsorption film, Nitrate or nitrite gas sensors for the electrochemical solid-state electrolyte.