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随着LSI的发展,对器件的可靠性要求越来越高,气密封装的器件内部湿度监测需要体积小、稳定性高、响应范围宽的湿度传感器及湿度仪。 中科院上海冶金研究所于86年底对Si—MOS电容湿度传感器和CH电容湿度仪通过技术鉴定。与会专家一致认为,主要性能已达到设计要求,填补了国内空白,其性能与国外同类传感器相当,为我国电子工业的可靠性检测,提供了有效手段。 Si—MOS电容湿度传感器的几何尺寸为2×1.5×0.3mm,有效工作面积1×1mm~2,可封入各种器件的管壳中。气体温度从0.5ppmv到300ppmv时,响应时间3秒,反向减湿时间≤7秒。
With the development of LSI, the reliability of the device is getting higher and higher. Airtight package internal humidity monitoring needs small size, high stability, wide response range humidity sensor and humidity meter. Shanghai Institute of Metallurgy, Chinese Academy of Sciences at the end of 86 Si-MOS capacitive humidity sensor and CH capacitive humidity meter through technical appraisal. Experts agreed that the main performance has reached the design requirements, to fill the gaps in the country, its performance and foreign similar sensors for the reliability of China’s electronics industry testing, provides an effective means. Si-MOS capacitive humidity sensor geometry is 2 × 1.5 × 0.3mm, effective working area of 1 × 1mm ~ 2, can be sealed in a variety of devices in the shell. Gas temperature from 0.5ppmv to 300ppmv, the response time of 3 seconds, reverse dehumidification time ≤ 7 seconds.