为了研究三坐标轮廓测量仪测量离轴非球面的数据处理,介绍了三坐标轮廓测量仪测量离轴非球面的原理,对除三坐标测量仪自身误差之外的误差进行了详细的分析,在此基础上建立了校正这些误差的离轴非球面数据处理模型。使用Matlab与C语言混合编程,并进行了数据模拟,对实际离轴非球面进行了测量。在对离轴非球面数据进行模拟时,面形误差PV值小于0.001μm;实际应用时,面形误差PV值约为0.245μm,利用数据处理模型得到的面形误差PV值为1.2μm,达到了三坐标轮廓测量仪本身的测量精度。结果表明,所建立的数据处理模型和处理软件是正确的。 In order to study the data processing of off-axis aspheric surface measured by CMM, the principle of CMM measuring off-axis aspheric surface is introduced. The error except CMM’s own error is analyzed in detail. On this basis, an off-axis aspheric data processing model for correcting these errors is established. Using Matlab and C language mixed programming, and the data simulation, the actual off-axis aspheric surface were measured. In the simulation of off-axis aspheric data, the shape error PV value is less than 0.001μm; in practical application, the shape error PV value is about 0.245μm, the surface shape error PV value obtained by the data processing model is 1.2μm, reaching The measuring accuracy of the three-coordinate profiler itself. The results show that the established data processing model and processing software are correct.