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针对传统矢量水听器在实际应用中需要辅助弹性悬挂,不便于工程应用的问题,设计并制造了一种具有低加速度灵敏度可刚性固定的差分型MEMS矢量水听器。介绍了该水听器的工作原理,制作了试验样机。搭建实验平台对样机进行测试,结果表明:500 Hz时声压灵敏度为-185 dB(0dB参考值1 V/μPa),频带内指向性凹点深度大于30 dB,加速度灵敏度相对于普通型矢量水听器下降20 dB(0dB参考值1 V/g)。理论与实验证明该差分型MEMS矢量水听器可以实现刚性固定的目的,具有广泛的工程应用前景。
Aimed at the problem that the traditional vector hydrophone needs auxiliary elastic suspension in actual application, which is inconvenient for engineering application, a differential type MEMS vector hydrophone with low acceleration sensitivity and rigid fixation is designed and manufactured. The working principle of the hydrophone is introduced and the prototype of the test is made. The experimental platform is set up to test the prototype. The results show that the sound pressure sensitivity is -185 dB at 500 Hz (0 dB reference value of 1 V / μPa) and the depth of directivity pits in the frequency band is greater than 30 dB. The acceleration sensitivity is lower than that of ordinary vector water The listener drops 20 dB (0 dB reference 1 V / g). The theory and experiment prove that the differential type MEMS vector hydrophone can achieve the purpose of rigid fixation and has a wide range of engineering application prospects.