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提出了利用激光扫描剥离靶材，沉积膜厚分布均匀的大尺寸高温超导薄膜分析模型。利用这模型取得的结果表明：激光扫描方法沉积的薄膜厚度分布依赖于激光扫描半径、靶面与基片的间距。对于一定均匀性程度要求的薄膜，存在一个能获得最大尺寸薄膜的最佳激光扫描半径。实验结果与理论分析基本一致。
A large-scale high-temperature superconducting thin film analysis model using laser scanning to strip the target material is proposed. The results obtained with this model show that the thickness distribution of the deposited film by the laser scanning method depends on the laser scanning radius and the distance between the target surface and the substrate. For films requiring a certain level of uniformity, there is an optimum laser scanning radius to obtain the largest film size. Experimental results and theoretical analysis are basically the same.