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用于能动镜中的力驱动器采用直流电机作为驱动源,经减速器后利用滚珠丝杆传动加弹簧组件实现纳米级微位移,而采用丝杆副实现自锁。驱动器基于拉压力传感器实现闭环控制,高增益的PID控制器克服了机械摩擦的微动特性获得比较好的线性度。用4个力驱动器和3个刚性支撑组成了一个能动镜原型样机,光学干涉仪测量结果表明,力驱动器平均位移分辨力约为10nm、最大可变形量达±8μm、最大驱动力达±700N。实验结果证明了力驱动器应用于能动镜驱动器的可行性,为能动镜的实用化提供了实验依据。
For active mirror in the drive using DC motor as the drive source, after the reducer using ball screw drive plus spring assembly to achieve nano-micro-displacement, and the use of screw to achieve self-locking. The actuator is closed-loop control based on the pull-pressure sensor, and the high-gain PID controller overcomes the fretting characteristics of mechanical friction to obtain better linearity. The prototype of the movable mirror is composed of four force drivers and three rigid supports. The measurement results of the optical interferometer show that the average displacement resolution of the force driver is about 10nm, the maximum deformability is ± 8μm and the maximum driving force is ± 700N. The experimental results prove the feasibility of applying the force actuator to the movable mirror actuator and provide the experimental basis for the practical use of the movable mirror.