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研究了Ti(CN)薄膜内氧的作用.研究结果表明,Ti(CN)薄膜内加入氧后可以消除薄膜的柱状晶结构,薄膜的断口呈致密的纤维状组织.随着反应气体中空气或CO_2气体流量的增加,Ti(CNO)薄膜的硬度呈上升趋势,并在空气的流量为40ml/min或CO_2的流量为15ml/min时(分别约占总量的15%和6%)、薄膜的硬度达到最大值.
The effect of oxygen in Ti (CN) thin film was studied. The results show that the columnar crystal structure of the thin film can be eliminated and the dense fibrous structure of the film is broken when oxygen is added into the Ti (CN) The hardness of Ti (CNO) thin films increased with the increase of CO 2 gas flow rate. When the air flow rate was 40ml / min or CO 2 flow rate was 15ml / min (about 15% and 6% of the total volume respectively) The hardness reaches its maximum.