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在介绍了3.39μm双波长拍波干涉仪测量原理的基础上,提出了激光瞄准大型工件内外径测量点和3.39μm双波长拍波干涉仪绝对测量大直径的新方法,给出了瞄准定位的实验结果,并对测量系统的误差进行了分析。分析表明:测量系统测量10m直径时,其测量误差小于0.03mm。
Based on the introduction of the measurement principle of 3.39μm dual-wavelength beat-wave interferometer, a new method of laser aiming at the measurement points of large and small workpiece inside and outside diameter and the absolute measurement of large diameter of 3.39μm dual-wavelength beat-wave interferometer is proposed. Positioning of the experimental results, and the error of the measurement system were analyzed. Analysis shows that: Measurement system measuring 10m diameter, the measurement error is less than 0.03mm.