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用一台常规的真空镀膜机改建为化学气相沉积 (CVD)系统 ,并用以制备了金刚石薄膜 .讨论了用CVD方法制备金刚石膜作为一个新的现代化物理教学实验的优点
A conventional vacuum coating machine was rebuilt into a chemical vapor deposition (CVD) system and used to prepare diamond films. The advantages of using CVD methods to prepare diamond films as a new modern physics teaching experiment